Cleanroom Robot Series

Stäubli Cleanroom robots meet ISO 14644-1 class 2 (SCR version) and class 4 (CR version) standards and feature a totally enclosed arm with a glossy polyurethane surface, capable of high dexterity. Compared to other wafer robots, the Stäubli SCR and CR robots offer greater flexibility, higher payload capacity, and extended reach, perfectly meeting the challenges of wafer/photomask/carrier/cassette handling. A compact arm footprint also helps to save precious space in dedicated machines.

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